发明授权
- 专利标题： Automatic initiation of reference spectra library generation for optical monitoring
- 专利标题（中）： 用于光学监测的自动启动参考光谱库生成
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申请号： US13088144申请日： 2011-04-15
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公开(公告)号： US08666665B2公开(公告)日： 2014-03-04
- 发明人: Jeffrey Drue David , Harry Q. Lee , Jun Qian , Jimin Zhang
- 申请人： Jeffrey Drue David , Harry Q. Lee , Jun Qian , Jimin Zhang
- 申请人地址： US CA Santa Clara
- 专利权人： Applied Materials, Inc.
- 当前专利权人： Applied Materials, Inc.
- 当前专利权人地址： US CA Santa Clara
- 代理机构： Fish & Richardson P.C.
- 主分类号： G06F19/00
- IPC分类号： G06F19/00 ; H01L21/00
摘要：
A method of generating reference spectra includes polishing a first substrate in a polishing apparatus, measuring a sequence of spectra from the first substrate during polishing with an in-situ optical monitoring system, for each spectrum in the sequence of spectra, determining a best matching reference spectrum from a first plurality of first reference spectra to generate a sequence of reference spectra, calculating a value of a metric of fit of the sequence of spectra to the sequence of reference spectra, comparing the value of the metric of fit to a threshold value and determining whether to generate a second library based on the comparison, and if the second library is determined to be generated, storing the sequence of spectra as a second plurality of reference spectra.
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