Invention Grant
- Patent Title: Horizontal articulated robot and substrate transfer system provided with the same
- Patent Title (中): 水平铰接式机器人和底盘传送系统提供
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Application No.: US13064171Application Date: 2011-03-09
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Publication No.: US08668428B2Publication Date: 2014-03-11
- Inventor: Kazunori Hino
- Applicant: Kazunori Hino
- Applicant Address: JP Kitakyushu-shi
- Assignee: Kabushiki Kaisha Yaskawa Denki
- Current Assignee: Kabushiki Kaisha Yaskawa Denki
- Current Assignee Address: JP Kitakyushu-shi
- Agency: Bacon & Thomas, PLLC
- Priority: JP2010-098054 20100421
- Main IPC: B25J18/04
- IPC: B25J18/04 ; H01L21/683

Abstract:
A horizontal articulated robot includes a first arm and a second arm respectively supported at their base end portions by a body and the tip end portion of the second arm to be rotatable about a first joint and a second joint; and a fork including its base end portion supported by the tip end portion of the second arm to be rotatable about a third joint. The first arm includes a first enlarged portion, formed in its tip end portion, with an upper surface positioned higher than an upper surface of the base end portion of the first arm. The second arm includes a second enlarged portion, formed in its tip end portion, with a lower surface positioned lower than a lower surface of the base end portion of the second arm. The first and the second enlarged portion are at least partially overlapped with each other horizontally.
Public/Granted literature
- US20110262257A1 Horizontal articulated robot and substrate transfer system provided with the same Public/Granted day:2011-10-27
Information query
IPC分类: