Invention Grant
US08670126B2 Optical interference measuring method and optical interference measuring apparatus 有权
光干涉测量方法和光干涉测量装置

Optical interference measuring method and optical interference measuring apparatus
Abstract:
In an optical interference measuring method according to the present invention, light emitted from a light source unit is split into measuring light and reference light, coherent light is detected that is obtained by interference of the reference light and the measuring light reflected from or scattered rearward from a measuring object, an optical-path length adjustment mechanism provided in the optical path of the reference light is driven to change the optical path length of the reference light, it is decided whether an image based on the detected coherent light is a normal image or a folded image based on the coherent light having varied with the change of the optical path length of the reference light, and the measuring object is measured from the detected coherent light based on a result of the decision about whether the image is a normal image or a folded image.
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