发明授权
- 专利标题: Profile measuring apparatus
- 专利标题(中): 型材测量仪器
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申请号: US13138247申请日: 2010-01-26
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公开(公告)号: US08670128B2公开(公告)日: 2014-03-11
- 发明人: Masato Kannaka , Eiji Takahashi , Masakazu Kajita
- 申请人: Masato Kannaka , Eiji Takahashi , Masakazu Kajita
- 申请人地址: JP Kobe-shi, Hyogo
- 专利权人: Kobe Steel, Ltd.
- 当前专利权人: Kobe Steel, Ltd.
- 当前专利权人地址: JP Kobe-shi, Hyogo
- 代理机构: Stites & Harbison PLLC
- 代理商 Juan Carlos A. Marquez, Esq.
- 优先权: JP2009-021290 20090202; JP2010-006653 20100115
- 国际申请: PCT/JP2010/050972 WO 20100126
- 国际公布: WO2010/087337 WO 20100805
- 主分类号: G01B9/02
- IPC分类号: G01B9/02
摘要:
A shape determining device (X) splits the original light beam from a light source (Y) into two light beams, directs the light beams to the front and back surfaces of the object (1) to be determined, and performs optical heterodyne interference using the split light beams at the front and back surfaces of the object (1) to be determined. In the shape determining device (X), each of the split light beams is further split into a main light beam and a subordinate light beam, the subordinate light beam interferes with the main light beam at each of the front and back surfaces before and after the illumination of the object (1) to be determined, the signals after the interference are phase-detected, and the difference between the phases acquired by the phase detection is detected at each of the front and back surfaces of the object (1) to be determined. In the shape determining device (X), optical modulation for performing the optical heterodyne interference is performed before the optical heterodyne interference of the split light beams after the split light beams are directed to the front and back surfaces of the object (1) to be determined. Furthermore, in the shape determining device (X), a measurement optical system before the phase detection and after the split light beams are directed to the front and back surfaces of the object (1) to be determined is maintained integrally.
公开/授权文献
- US20110279822A1 PROFILE MEASURING APPARATUS 公开/授权日:2011-11-17
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