发明授权
- 专利标题: Method of manufacturing vitreous silica crucible
- 专利标题(中): 石英玻璃坩埚的制造方法
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申请号: US13308328申请日: 2011-11-30
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公开(公告)号: US08671716B2公开(公告)日: 2014-03-18
- 发明人: Toshiaki Sudo , Takuma Yoshioka
- 申请人: Toshiaki Sudo , Takuma Yoshioka
- 申请人地址: JP Akita-shi
- 专利权人: Japan Super Quartz Corporation
- 当前专利权人: Japan Super Quartz Corporation
- 当前专利权人地址: JP Akita-shi
- 代理机构: Christensen O'Connor Johnson Kindness PLLC
- 优先权: JP2010-270478 20101203
- 主分类号: C03B19/09
- IPC分类号: C03B19/09
摘要:
There is provided a method of manufacturing a vitreous silica crucible having non-bubbles on the inner surface without necessitating new apparatuses for grinding and polishing and without damaging the productivity. According to the present invention, there is provided a method of manufacturing a vitreous silica crucible including the processes of: gathering a vitreous silica layer containing residual bubbles existing in a near-surface region of the transparent layer of the vitreous silica crucible by controlling the number of rotations applied to the vitreous silica crucible in a state that an inner surface side of the vitreous silica crucible is fused by arc heating; and moving a portion of a non-bubble layer in the surface of the transparent layer exposed by movement of the residual bubble-containing layer to cover a region in which bubbles have gathered with the non-bubble layer.
公开/授权文献
- US20120137735A1 METHOD OF MANUFACTURING VITREOUS SILICA CRUCIBLE 公开/授权日:2012-06-07
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