Invention Grant
- Patent Title: MEMS biaxial resonant accelerometer
- Patent Title (中): MEMS双轴谐振加速度计
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Application No.: US13303038Application Date: 2011-11-22
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Publication No.: US08671756B2Publication Date: 2014-03-18
- Inventor: Claudia Comi , Alberto Corigliano , Barbara Simoni
- Applicant: Claudia Comi , Alberto Corigliano , Barbara Simoni
- Applicant Address: IT Agrate Brianza
- Assignee: STMicroelectronics S.r.l.
- Current Assignee: STMicroelectronics S.r.l.
- Current Assignee Address: IT Agrate Brianza
- Agency: Seed IP Law Group PLLC
- Priority: ITTO2010A0944 20101126
- Main IPC: G01P15/10
- IPC: G01P15/10

Abstract:
A microelectromechanical detection structure for a MEMS resonant biaxial accelerometer is provided with: an inertial mass, anchored to a substrate by elastic elements to be suspended above the substrate. The elastic elements enabling inertial movements of the inertial mass along a first axis of detection and a second axis of detection that belong to a plane of main extension of said inertial mass, in response to respective linear external accelerations. At least one first resonant element and one second resonant element have a respective longitudinal extension, respectively along the first axis of detection and the second axis of detection, and are mechanically coupled to the inertial mass through a respective one of the elastic elements to undergo a respective axial stress when the inertial mass moves respectively along the first axis of detection and the second axis of detection.
Public/Granted literature
- US20120132003A1 MEMS BIAXIAL RESONANT ACCELEROMETER Public/Granted day:2012-05-31
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