发明授权
- 专利标题: Charging controlled RRAM device, and methods of making same
- 专利标题(中): 充电控制RRAM设备及其制作方法
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申请号: US13353922申请日: 2012-01-19
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公开(公告)号: US08673692B2公开(公告)日: 2014-03-18
- 发明人: Shyue Seng Tan , Tu Pei Chen
- 申请人: Shyue Seng Tan , Tu Pei Chen
- 申请人地址: SG Singapore SG Singapore
- 专利权人: GLOBALFOUNDRIES Singapore PTE Ltd.,Nanyang Technological University
- 当前专利权人: GLOBALFOUNDRIES Singapore PTE Ltd.,Nanyang Technological University
- 当前专利权人地址: SG Singapore SG Singapore
- 代理机构: Amerson Law Firm, PLLC
- 主分类号: H01L21/00
- IPC分类号: H01L21/00 ; H01L21/82 ; H01L21/84
摘要:
Disclosed herein is a novel charging controlled RRAM (Resistance Random Access Memory), and various methods of making such a charging controlled RRAM device. In one example, a device disclosed herein includes a first word line structure formed above a substrate, wherein the first word line structure includes a gate electrode and a nano-crystal containing layer of insulating material, a second word line structure formed above the substrate, wherein the second word line structure comprises a gate electrode and a nano-crystal containing layer of insulating material, a first implant region formed in the substrate proximate the first word line structure, wherein the first implant region defines a first bit line, and a second implant region formed in the substrate proximate the second word line structure, wherein the second implant region defines a second bit line.
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