Invention Grant
US08673728B2 Complementary stress liner to improve DGO/AVT devices and poly and diffusion resistors
有权
互补应力衬垫,用于改善DGO / AVT器件和聚和扩散电阻器
- Patent Title: Complementary stress liner to improve DGO/AVT devices and poly and diffusion resistors
- Patent Title (中): 互补应力衬垫,用于改善DGO / AVT器件和聚和扩散电阻器
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Application No.: US13667657Application Date: 2012-11-02
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Publication No.: US08673728B2Publication Date: 2014-03-18
- Inventor: Stefan Flachowsky , Jan Hoentschel , Thilo Scheiper
- Applicant: GlobalFoundries Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GlobalFoundries Inc.
- Current Assignee: GlobalFoundries Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Ditthavong Mori & Steiner, P.C.
- Main IPC: H01L21/20
- IPC: H01L21/20

Abstract:
Electron mobility and hole mobility is improved in long channel semiconductor devices and resistors by employing complementary stress liners. Embodiments include forming a long channel semiconductor device on a substrate, and forming a complementary stress liner on the semiconductor device. Embodiments include forming a resistor on a substrate, and tuning the resistance of the resistor by forming a complementary stress liner on the resistor. Compressive stress liners are employed for improving electron mobility in n-type devices, and tensile stress liners are employed for improving hole mobility in p-type devices.
Public/Granted literature
- US20130056854A1 COMPLEMENTARY STRESS LINER TO IMPROVE DGO/AVT DEVICES AND POLY AND DIFFUSION RESISTORS Public/Granted day:2013-03-07
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