Invention Grant
US08673728B2 Complementary stress liner to improve DGO/AVT devices and poly and diffusion resistors 有权
互补应力衬垫,用于改善DGO / AVT器件和聚和扩散电阻器

Complementary stress liner to improve DGO/AVT devices and poly and diffusion resistors
Abstract:
Electron mobility and hole mobility is improved in long channel semiconductor devices and resistors by employing complementary stress liners. Embodiments include forming a long channel semiconductor device on a substrate, and forming a complementary stress liner on the semiconductor device. Embodiments include forming a resistor on a substrate, and tuning the resistance of the resistor by forming a complementary stress liner on the resistor. Compressive stress liners are employed for improving electron mobility in n-type devices, and tensile stress liners are employed for improving hole mobility in p-type devices.
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