Invention Grant
- Patent Title: Laser crystallization system and method of manufacturing display apparatus using the same
- Patent Title (中): 激光结晶体系及其制造方法
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Application No.: US13272114Application Date: 2011-10-12
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Publication No.: US08673751B2Publication Date: 2014-03-18
- Inventor: Jae-Hwan Oh , Jae-Beom Choi , Won-Kyu Lee , Young-Jin Chang , Seong-Hyun Jin
- Applicant: Jae-Hwan Oh , Jae-Beom Choi , Won-Kyu Lee , Young-Jin Chang , Seong-Hyun Jin
- Applicant Address: KR Gyeonggi-Do
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Gyeonggi-Do
- Agency: Knobbe, Martens, Olson & Bear, LLP
- Priority: KR10-2010-00107713 20101101
- Main IPC: H01L21/20
- IPC: H01L21/20

Abstract:
A laser crystallization system and a method of manufacturing a display apparatus using the laser crystallization system are disclosed. In one embodiment, the system includes i) a mother substrate in which first, second, and third display regions and ii) a stage for supporting the mother substrate and moving in first and second directions perpendicular to each other. The embodiment also includes i) a first laser irradiation unit for irradiating a first laser beam having a width greater than or identical to a width of a side of one of the first, second, and third display regions in the first direction and ii) a second laser irradiation unit spaced apart from the first laser irradiation unit and irradiating a second laser beam having a width greater than or identical to the width of the one side in the first direction.
Public/Granted literature
- US20120107984A1 LASER CRYSTALLIZATION SYSTEM AND METHOD OF MANUFACTURING DISPLAY APPARATUS USING THE SAME Public/Granted day:2012-05-03
Information query
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