发明授权
- 专利标题： Out-of-plane spacer defined electrode
- 专利标题（中）： 面外间隔限定电极
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申请号： US13232005申请日： 2011-09-14
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公开(公告)号： US08673756B2公开(公告)日： 2014-03-18
- 发明人: Andrew B. Graham , Gary Yama , Gary O'Brien
- 申请人： Andrew B. Graham , Gary Yama , Gary O'Brien
- 申请人地址： DE Stuttgart
- 专利权人： Robert Bosch GmbH
- 当前专利权人： Robert Bosch GmbH
- 当前专利权人地址： DE Stuttgart
- 代理机构： Maginot, Moore & Beck
- 主分类号： H01L21/20
- IPC分类号： H01L21/20
摘要：
In one embodiment, a method of forming an out-of-plane electrode includes providing an oxide layer above an upper surface of a device layer, providing a first cap layer portion above an upper surface of the oxide layer, etching a first electrode perimeter defining trench extending through the first cap layer portion and stopping at the oxide layer, depositing a first material portion within the first electrode perimeter defining trench, depositing a second cap layer portion above the first material portion, vapor releasing a portion of the oxide layer, depositing a third cap layer portion above the second cap layer portion, etching a second electrode perimeter defining trench extending through the second cap layer portion and the third cap layer portion, and depositing a second material portion within the second electrode perimeter defining trench, such that a spacer including the first material portion and the second material portion define out-of-plane electrode.
公开/授权文献
- US20120261822A1 Out-of-Plane Spacer Defined Electrode 公开/授权日：2012-10-18
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