Invention Grant
- Patent Title: Out-of-plane spacer defined electrode
- Patent Title (中): 面外间隔限定电极
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Application No.: US13232005Application Date: 2011-09-14
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Publication No.: US08673756B2Publication Date: 2014-03-18
- Inventor: Andrew B. Graham , Gary Yama , Gary O'Brien
- Applicant: Andrew B. Graham , Gary Yama , Gary O'Brien
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Maginot, Moore & Beck
- Main IPC: H01L21/20
- IPC: H01L21/20
Abstract:
In one embodiment, a method of forming an out-of-plane electrode includes providing an oxide layer above an upper surface of a device layer, providing a first cap layer portion above an upper surface of the oxide layer, etching a first electrode perimeter defining trench extending through the first cap layer portion and stopping at the oxide layer, depositing a first material portion within the first electrode perimeter defining trench, depositing a second cap layer portion above the first material portion, vapor releasing a portion of the oxide layer, depositing a third cap layer portion above the second cap layer portion, etching a second electrode perimeter defining trench extending through the second cap layer portion and the third cap layer portion, and depositing a second material portion within the second electrode perimeter defining trench, such that a spacer including the first material portion and the second material portion define out-of-plane electrode.
Public/Granted literature
- US20120261822A1 Out-of-Plane Spacer Defined Electrode Public/Granted day:2012-10-18
Information query
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