Invention Grant
US08674463B2 Multifunction MEMS element and integrated method for making MOS and multifunction MEMS
有权
多功能MEMS元件和MOS和多功能MEMS的集成方法
- Patent Title: Multifunction MEMS element and integrated method for making MOS and multifunction MEMS
- Patent Title (中): 多功能MEMS元件和MOS和多功能MEMS的集成方法
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Application No.: US12430105Application Date: 2009-04-26
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Publication No.: US08674463B2Publication Date: 2014-03-18
- Inventor: Hui-Shen Shih
- Applicant: Hui-Shen Shih
- Applicant Address: TW Science-Based Industrial Park, Hsin-Chu
- Assignee: United Microelectronics Corp.
- Current Assignee: United Microelectronics Corp.
- Current Assignee Address: TW Science-Based Industrial Park, Hsin-Chu
- Agent Winston Hsu; Scott Margo
- Main IPC: H01L29/84
- IPC: H01L29/84 ; H01L21/02
Abstract:
A multifunction MEMS element includes a first cantilever, a second cantilever and a MEMS component. The first cantilever, the second cantilever and the MEMS component together form a MEMS structure. The MEMS component includes an inductor device.
Public/Granted literature
- US20100270628A1 MULTIFUNCTION MENS ELEMENT AND INTEGRATED METHOD FOR MAKING MOS AND MULTIFUNCTION MENS Public/Granted day:2010-10-28
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