Invention Grant
- Patent Title: Optically transduced MEMS magnetometer
- Patent Title (中): 光学传感MEMS磁强计
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Application No.: US13326139Application Date: 2011-12-14
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Publication No.: US08674689B1Publication Date: 2014-03-18
- Inventor: Gregory N. Nielson , Eric Langlois
- Applicant: Gregory N. Nielson , Eric Langlois
- Applicant Address: US NM Albuquerque
- Assignee: Sandia Corporation
- Current Assignee: Sandia Corporation
- Current Assignee Address: US NM Albuquerque
- Agent Helen S. Baca
- Main IPC: G01R33/02
- IPC: G01R33/02

Abstract:
MEMS magnetometers with optically transduced resonator displacement are described herein. Improved sensitivity, crosstalk reduction, and extended dynamic range may be achieved with devices including a deflectable resonator suspended from the support, a first grating extending from the support and disposed over the resonator, a pair of drive electrodes to drive an alternating current through the resonator, and a second grating in the resonator overlapping the first grating to form a multi-layer grating having apertures that vary dimensionally in response to deflection occurring as the resonator mechanically resonates in a plane parallel to the first grating in the presence of a magnetic field as a function of the Lorentz force resulting from the alternating current. A plurality of such multi-layer gratings may be disposed across a length of the resonator to provide greater dynamic range and/or accommodate fabrication tolerances.
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