发明授权
US08676355B2 Position control apparatus including iterative learning circuit, exposure apparatus, method for manufacturing device, and iterative learning method for use in position control apparatus having iterative learning circuit including learning filter
有权
位置控制装置，包括迭代学习电路，曝光装置，制造装置的方法和迭代学习方法，用于具有迭代学习电路的位置控制装置，包括学习滤波器
- 专利标题： Position control apparatus including iterative learning circuit, exposure apparatus, method for manufacturing device, and iterative learning method for use in position control apparatus having iterative learning circuit including learning filter
- 专利标题（中）： 位置控制装置，包括迭代学习电路，曝光装置，制造装置的方法和迭代学习方法，用于具有迭代学习电路的位置控制装置，包括学习滤波器
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申请号： US12393871申请日： 2009-02-26
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公开(公告)号： US08676355B2公开(公告)日： 2014-03-18
- 发明人: Kiyoshi Takagi
- 申请人： Kiyoshi Takagi
- 申请人地址： JP Tokyo
- 专利权人： Canon Kabushiki Kaisha
- 当前专利权人： Canon Kabushiki Kaisha
- 当前专利权人地址： JP Tokyo
- 代理机构： Canon U.S.A., Inc., IP Division
- 优先权： JP2008-050126 20080229
- 主分类号： G05D1/12
- IPC分类号： G05D1/12 ; G05B13/02 ; G06F17/00
摘要：
A position control apparatus includes a detecting unit configured to detect a position of a control target, a subtracting unit configured to subtract an output of the detecting unit from a target value, an iterative learning control circuit including a filter into which a deviation between the output of the detecting unit and the target value is input, where the iterative learning control circuit feeds forward a control input to the control target, and a parameter computing unit configured to compute a variation in a parameter of the control target. A characteristic of the filter is changed in accordance with the variation in the parameter of the control target.
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