Invention Grant
US08677807B2 Micro viscometer 有权
微型粘度计

Micro viscometer
Abstract:
Disclosed is a micro viscometer comprising a substrate having a first chamber and a second chamber that are positioned at intervals; a thin film disposed on the substrate to cover the first chamber and the second chamber; an actuating part that disposed on the thin film corresponding to the first chamber; and a sensing part that disposed on the thin film corresponding to the second chamber, wherein at least one main trench is formed in between the first chamber and the second chamber.
Public/Granted literature
Information query
Patent Agency Ranking
0/0