Invention Grant
- Patent Title: Film forming apparatus forming a coating film using spiral coating while adjusting sound wave projected onto the coating film
- Patent Title (中): 成膜装置在调节投射到涂膜上的声波时,使用螺旋涂层形成涂膜
-
Application No.: US13214409Application Date: 2011-08-22
-
Publication No.: US08677933B2Publication Date: 2014-03-25
- Inventor: Tsuyoshi Sato , Kenichi Ooshiro
- Applicant: Tsuyoshi Sato , Kenichi Ooshiro
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2010-206715 20100915
- Main IPC: B05C11/00
- IPC: B05C11/00 ; B05C13/02 ; B05C11/02 ; B05B3/00 ; B06B1/02 ; B01J19/08 ; B05D1/40 ; B05D3/00

Abstract:
According to one embodiment, a film forming apparatus includes: a stage on which a coating object is placed; a rotation mechanism rotating the stage; an application nozzle supplying a coating material to the coating object; an application moving mechanism moving the application nozzle; a controller which controls the rotation mechanism and application moving mechanism to rotate the stage and move the application nozzle between the rotation center and the outer edge and controls the application nozzle to apply the coating material to the coating object; and a sound wave generator which generates a sound wave. The film forming apparatus projects the sound wave onto the surface of the coating film.
Public/Granted literature
- US20120064349A1 FILM FORMING APPARATUS, FILM FORMING METHOD, AND ELECTRONIC DEVICE Public/Granted day:2012-03-15
Information query