Invention Grant
- Patent Title: Method for fabricating quantum dot and semiconductor structure containing quantum dot
- Patent Title (中): 制造量子点和含有量子点的半导体结构的方法
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Application No.: US13325528Application Date: 2011-12-14
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Publication No.: US08679879B2Publication Date: 2014-03-25
- Inventor: Hong Seok Lee
- Applicant: Hong Seok Lee
- Applicant Address: KR Buk-Gu, Gwangju
- Assignee: Gwangju Institute of Science and Technology
- Current Assignee: Gwangju Institute of Science and Technology
- Current Assignee Address: KR Buk-Gu, Gwangju
- Agency: Nath, Goldberg & Meyer
- Agent Joshua B. Goldberg
- Priority: KR10-2011-0038620 20110425
- Main IPC: H01L21/336
- IPC: H01L21/336

Abstract:
Disclosed are a method for fabricating a quantum dot. The method includes the steps of (a) preparing a compound semiconductor layer including a quantum well structure formed by sequentially stacking a first barrier layer, a well layer and a second barrier layer; (b) forming a dielectric thin film pattern including a first dielectric thin film having a thermal expansion coefficient higher than a thermal expansion coefficient of the second barrier layer and a second dielectric thin film having a thermal expansion coefficient lower than the thermal expansion coefficient of the second barrier layer on the second barrier layer; and (c) heat-treating the compound semiconductor layer formed thereon with the dielectric thin film pattern to cause an intermixing between elements of the well layer and elements of the barrier layers at a region of the compound semiconductor layer under the second dielectric thin film.
Public/Granted literature
- US20120267603A1 METHOD FOR FABRICATING QUANTUM DOT AND SEMICONDUCTOR STRUCTURE CONTAINING QUANTUM DOT Public/Granted day:2012-10-25
Information query
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