发明授权
- 专利标题: Cross-coupling-based design using diffusion contact structures
- 专利标题(中): 使用扩散接触结构的基于交叉耦合的设计
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申请号: US13465134申请日: 2012-05-07
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公开(公告)号: US08679911B2公开(公告)日: 2014-03-25
- 发明人: Yan Wang , Yuansheng Ma , Jongwook Kye , Mahbub Rashed
- 申请人: Yan Wang , Yuansheng Ma , Jongwook Kye , Mahbub Rashed
- 申请人地址: KY Grand Cayman
- 专利权人: GlobalFoundries Inc.
- 当前专利权人: GlobalFoundries Inc.
- 当前专利权人地址: KY Grand Cayman
- 代理机构: Ditthavong Mori & Steiner, P.C.
- 主分类号: H01L21/8238
- IPC分类号: H01L21/8238
摘要:
An approach for providing cross-coupling-based designs using diffusion contact structures is disclosed. Embodiments include providing first and second gate structures over a substrate; providing a gate cut region across the first gate structure, the second gate structure, or a combination thereof; providing a first gate contact over the first gate structure; providing a second gate contact over the second gate structure; and providing a diffusion contact structure coupling the first gate contact to the second gate contact, the diffusion contact structure having vertices within the gate cut region.
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