发明授权
- 专利标题: Vertical transistor structure and method of manufacturing same
- 专利标题(中): 垂直晶体管结构及其制造方法
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申请号: US13337810申请日: 2011-12-27
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公开(公告)号: US08680600B2公开(公告)日: 2014-03-25
- 发明人: Yukihiro Nagai
- 申请人: Yukihiro Nagai
- 申请人地址: TW Taichung
- 专利权人: Rexchip Electronics Corporation
- 当前专利权人: Rexchip Electronics Corporation
- 当前专利权人地址: TW Taichung
- 代理机构: Muncy, Geissler, Olds & Lowe, P.C.
- 主分类号: H01L27/108
- IPC分类号: H01L27/108
摘要:
A vertical transistor structure includes a substrate, a plurality of pillars located on the substrate and spaced from each other at a selected distance, a gate line and a plurality of conductors. The pillars are aligned in a straight line in a first direction and have respectively a primary control wall along the first direction and two ancillary control walls perpendicular to the primary control wall. The gate line is connected to the primary control wall in the first direction through a first isolated layer. The conductors are interposed between the ancillary control walls through second isolated layers. By providing the gate line merely on the primary control wall and the conductors to aid the gate line to control ON/OFF of the pillars, problems of etching and separating gate material during gradually shrunken feature size process that are difficult to control etching positions and etching duration can be prevented.
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