发明授权
- 专利标题： Devices and methods for position determination and surface measurement
- 专利标题（中）： 位置确定和表面测量的装置和方法
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申请号： US13394916申请日： 2010-08-30
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公开(公告)号： US08681344B2公开(公告)日： 2014-03-25
- 发明人: Bernd Spruck , Cristina Alvarez Diez , Simon Brattke , Lars-Christian Wittig , Stefan Richter , Enrico Geissler , Christian Koos , Oliver Schmidt , Frank Hoeller
- 申请人： Bernd Spruck , Cristina Alvarez Diez , Simon Brattke , Lars-Christian Wittig , Stefan Richter , Enrico Geissler , Christian Koos , Oliver Schmidt , Frank Hoeller
- 申请人地址： DE Oberkochen
- 专利权人： Carl Zeiss AG
- 当前专利权人： Carl Zeiss AG
- 当前专利权人地址： DE Oberkochen
- 代理机构： Sand & Sebolt
- 优先权： DE102009040837 20090910
- 国际申请： PCT/EP2010/062637 WO 20100830
- 国际公布： WO2011/029740 WO 20110317
- 主分类号： G01B11/14
- IPC分类号： G01B11/14 ; G01B11/24 ; G01B11/02
摘要：
In an embodiment a method for position determination of an object in a spatial area is provided in which the object is illuminated with at least one light beam. The light beam does not cover the complete spatial area and is guided into a part of the spatial area in which the object is present depending on the position of the object. In another aspect a method for measuring a surface is provided.