Invention Grant
US08683863B2 Micromechanical yaw rate sensor having two sensitive axes and coupled detection modes
有权
具有两个敏感轴和耦合检测模式的微机械偏航率传感器
- Patent Title: Micromechanical yaw rate sensor having two sensitive axes and coupled detection modes
- Patent Title (中): 具有两个敏感轴和耦合检测模式的微机械偏航率传感器
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Application No.: US12987732Application Date: 2011-01-10
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Publication No.: US08683863B2Publication Date: 2014-04-01
- Inventor: Johannes Classen , Burkhard Kuhlmann , Daniel Christoph Meisel
- Applicant: Johannes Classen , Burkhard Kuhlmann , Daniel Christoph Meisel
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Kenyon & Kenyon LLP
- Priority: DE102010000811 20100112
- Main IPC: G01C19/56
- IPC: G01C19/56

Abstract:
In a yaw rate sensor with a substrate having a main extent plane and with a first and second partial structure disposed parallel to the main extent plane, the first partial structure includes a first driving structure and the second partial structure includes a second driving structure, the first and second partial structure being excitable by a driving device, via the first and second driving structure, into oscillation parallel to a first axis parallel to the main extent plane, the first partial structure having a first Coriolis element and the second partial structure having a second Coriolis element, the yaw rate sensor being characterized in that the first and second Coriolis elements are displaceable by a Coriolis force parallel to a second axis, which is perpendicular to the first axis, and parallel to a third axis, which is perpendicular to the first and second axis, the second axis extending parallel to the main extent plane, and the first Coriolis element being connected to the second Coriolis element via a coupling element.
Public/Granted literature
- US20110185813A1 MICROMECHANICAL YAW RATE SENSOR HAVING TWO SENSITIVE AXES AND COUPLED DETECTION MODES Public/Granted day:2011-08-04
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