Invention Grant
- Patent Title: Method for manufacturing a CMOS device having dual metal gate
- Patent Title (中): 制造具有双金属栅极的CMOS器件的方法
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Application No.: US12013485Application Date: 2008-01-14
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Publication No.: US08685811B2Publication Date: 2014-04-01
- Inventor: Chien-Ting Lin , Li-Wei Cheng , Che-Hua Hsu , Guang-Hwa Ma , Chin-Sheng Yang
- Applicant: Chien-Ting Lin , Li-Wei Cheng , Che-Hua Hsu , Guang-Hwa Ma , Chin-Sheng Yang
- Applicant Address: TW Science-Based Industrial Park, Hsin-Chu
- Assignee: United Microelectronics Corp.
- Current Assignee: United Microelectronics Corp.
- Current Assignee Address: TW Science-Based Industrial Park, Hsin-Chu
- Agent Winston Hsu; Scott Margo
- Main IPC: H01L21/8238
- IPC: H01L21/8238

Abstract:
A method for manufacturing a CMOS device includes providing a substrate having a first active region and a second active region defined thereon, forming a first conductive type transistor and a second conductive type transistor respectively in the first and the second active regions, performing a salicide process, forming an ILD layer, performing a first etching process to remove a first gate of the first conductive type transistor and to form an opening while a high-K gate dielectric layer is exposed in a bottom of the opening, and forming at least a first metal layer in the opening.
Public/Granted literature
- US20090181504A1 METHOD FOR MANUFACTURING A CMOS DEVICE HAVING DUAL METAL GATE Public/Granted day:2009-07-16
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