发明授权
- 专利标题: Formation of metal nanospheres and microspheres
- 专利标题(中): 金属纳米球和微球的形成
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申请号: US13220816申请日: 2011-08-30
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公开(公告)号: US08685858B2公开(公告)日: 2014-04-01
- 发明人: Augustin J. Hong , Woo-Shik Jung , Jeehwan Kim , Jae-Woong Nah , Devendra K. Sadana
- 申请人: Augustin J. Hong , Woo-Shik Jung , Jeehwan Kim , Jae-Woong Nah , Devendra K. Sadana
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理机构: Tutunjian & Bitetto, P.C.
- 代理商 Louis J. Percello
- 主分类号: H01L21/311
- IPC分类号: H01L21/311
摘要:
Hemispheres and spheres are formed and employed for a plurality of applications. Hemispheres are employed to form a substrate having an upper surface and a lower surface. The upper surface includes peaks of pillars which have a base attached to the lower surface. The peaks have a density defined at the upper surface by an array of hemispherical metal structures that act as a mask during an etch to remove substrate material down to the lower surface during formation of the pillars. The pillars are dense and uniform and include a microscale average diameter. The spheres are formed as independent metal spheres or nanoparticles for other applications.
公开/授权文献
- US20130049158A1 FORMATION OF METAL NANOSPHERES AND MICROSPHERES 公开/授权日:2013-02-28