Invention Grant
- Patent Title: Method for manufacturing a micromechanical component, and micromechanical component
- Patent Title (中): 微机械部件的制造方法以及微机电部件
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Application No.: US13057411Application Date: 2009-07-06
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Publication No.: US08687255B2Publication Date: 2014-04-01
- Inventor: Stefan Finkbeiner , Tjalf Pirk , Christoph Friese
- Applicant: Stefan Finkbeiner , Tjalf Pirk , Christoph Friese
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Kenyon & Kenyon LLP
- Priority: DE102008041178 20080812
- International Application: PCT/EP2009/058504 WO 20090706
- International Announcement: WO2010/018029 WO 20100218
- Main IPC: G02B26/08
- IPC: G02B26/08

Abstract:
A method for manufacturing a micromechanical component is described, including the steps of: forming a first etch stop layer on a base substrate, the first etch stop layer being formed in such a way that it has a first pattern of through-cutouts; forming a first electrode-material layer on the first etch stop layer; forming a second etch stop layer on the first electrode-material layer, the second etch stop layer being formed in such a way that it has a second pattern of through-cutouts differing from the first pattern; forming a second electrode-material layer on the second etch stop layer; forming a patterned mask on the second electrode-material layer; and carrying out a first etching step in a first direction and a second etching step in a second direction counter to the first direction in order to etch at least one first electrode unit out of the first electrode-material layer and to etch at least one second electrode unit out of the second electrode-material layer. Also described are micromechanical components.
Public/Granted literature
- US20110279919A1 METHOD FOR MANUFACTURING A MICROMECHANICAL COMPONENT, AND MICROMECHANICAL COMPONENT Public/Granted day:2011-11-17
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