发明授权
- 专利标题： Enhancing accuracy of fast high-resolution X-ray diffractometry
- 专利标题（中）： 提高快速高分辨率X射线衍射的准确性
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申请号： US13180568申请日： 2011-07-12
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公开(公告)号： US08687766B2公开(公告)日： 2014-04-01
- 发明人: Matthew Wormington , Alexander Krohmal , David Berman , Gennady Openganden
- 申请人： Matthew Wormington , Alexander Krohmal , David Berman , Gennady Openganden
- 申请人地址： IL Migdal Ha'Emek
- 专利权人： Jordan Valley Semiconductors Ltd.
- 当前专利权人： Jordan Valley Semiconductors Ltd.
- 当前专利权人地址： IL Migdal Ha'Emek
- 代理机构： D. Kligler I.P. Services Ltd.
- 主分类号： G01N23/20
- IPC分类号： G01N23/20 ; G01T1/24
摘要：
A method for analysis includes directing a converging beam of X-rays toward a surface of a sample and sensing the X-rays that are diffracted from the sample while resolving the sensed X-rays as a function of angle so as to generate a diffraction spectrum of the sample. The diffraction spectrum is corrected to compensate for a non-uniform property of the converging beam.
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