Invention Grant
- Patent Title: Micro-electro-mechanical system microphone chip with expanded back chamber
- Patent Title (中): 微机电系统麦克风芯片具有扩展后室
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Application No.: US13482350Application Date: 2012-05-29
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Publication No.: US08687827B2Publication Date: 2014-04-01
- Inventor: Hung-Jen Chen , Kuan-Hsun Chiu , Chun-Chieh Wang , Ming-Li Hsu
- Applicant: Hung-Jen Chen , Kuan-Hsun Chiu , Chun-Chieh Wang , Ming-Li Hsu
- Applicant Address: TW Taichung
- Assignee: Merry Electronics Co., Ltd.
- Current Assignee: Merry Electronics Co., Ltd.
- Current Assignee Address: TW Taichung
- Agency: Muncy, Geissler, Olds & Lowe, P.C.
- Main IPC: H04R25/00
- IPC: H04R25/00 ; H01L29/84

Abstract:
A MEMS microphone chip with an expanded back chamber includes a first chip unit and a second chip unit. The first chip unit has a first substrate, a vibration membrane layer is formed above an end of the first substrate, and a space is formed below the vibration membrane layer of the first substrate, so that the vibration membrane layer is suspended above the first substrate to vibrate. The second chip unit has a second substrate to couple with another end of the first substrate, and a groove is formed in the second substrate with a width larger than that of the space; when the first substrate and the second substrate are coupled together, the groove and the space are connected together to act as the back chamber of the vibration membrane layer.
Public/Granted literature
- US20130322661A1 MICRO-ELECTRO-MECHANICAL SYSTEM MICROPHONE CHIP WITH EXPANDED BACK CHAMBER Public/Granted day:2013-12-05
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