Invention Grant
- Patent Title: Double-sided integrated circuit chips
- Patent Title (中): 双面集成电路芯片
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Application No.: US13783438Application Date: 2013-03-04
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Publication No.: US08689152B2Publication Date: 2014-04-01
- Inventor: Kerry Bernstein , Timothy Dalton , Jeffrey P. Gambino , Mark D. Jaffe , Paul D. Kartschoke , Stephen E. Luce , Anthony K. Stamper
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Schmeiser, Olsen & Watts
- Agent Richard Kotulak
- Main IPC: G06F17/50
- IPC: G06F17/50 ; H01L29/04 ; H01L29/15 ; H01L31/036 ; H01L21/30 ; H01L21/46

Abstract:
A double-sided integrated circuit chips, methods of fabricating the double-sided integrated circuit chips and design structures for double-sided integrated circuit chips. The method includes removing the backside silicon from two silicon-on-insulator wafers having devices fabricated therein and bonding them back to back utilizing the buried oxide layers. Contacts are then formed in the upper wafer to devices in the lower wafer and wiring levels are formed on the upper wafer. The lower wafer may include wiring levels. The lower wafer may include landing pads for the contacts. Contacts to the silicon layer of the lower wafer may be silicided.
Public/Granted literature
- US20130179853A1 DOUBLE-SIDED INTEGRATED CIRCUIT CHIPS Public/Granted day:2013-07-11
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