发明授权
- 专利标题： Concave and convex micromirrors and methods of making the same
- 专利标题（中）： 凹凸微镜及其制作方法
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申请号： US11450236申请日： 2006-06-09
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公开(公告)号： US08691100B2公开(公告)日： 2014-04-08
- 发明人: Dah-Chuen Ho , Eugene Chu , Yuh-Haw Chang , Fei-Yun Chen , Michael Wu , Eric Chao
- 申请人： Dah-Chuen Ho , Eugene Chu , Yuh-Haw Chang , Fei-Yun Chen , Michael Wu , Eric Chao
- 申请人地址： TW Hsin-Chu
- 专利权人： Taiwan Semiconductor Manufacturing Co. Ltd.
- 当前专利权人： Taiwan Semiconductor Manufacturing Co. Ltd.
- 当前专利权人地址： TW Hsin-Chu
- 代理机构： Tung & Associates
- 主分类号： B29D11/00
- IPC分类号： B29D11/00 ; G02B26/00
摘要：
A method comprising providing a first substrate and forming a first sacrificial layer over the first substrate, the first sacrificial layer comprising a curved surface portion, and forming a curved micromirror by depositing a reflective material over at the curved surface portion.
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