发明授权
- 专利标题： Fluorine-containing compounds and their polymers useful for anti-reflection film materials and resist compositions
- 专利标题（中）： 含氟化合物及其聚合物可用于抗反射膜材料和抗蚀剂组合物
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申请号： US13094281申请日： 2011-04-26
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公开(公告)号： US08691491B2公开(公告)日： 2014-04-08
- 发明人: Shinichi Sumida , Haruhiko Komoriya , Kazuhiko Maeda
- 申请人： Shinichi Sumida , Haruhiko Komoriya , Kazuhiko Maeda
- 申请人地址： JP Ube-shi
- 专利权人： Central Glass Company, Limited
- 当前专利权人： Central Glass Company, Limited
- 当前专利权人地址： JP Ube-shi
- 代理机构： Crowell & Moring LLP
- 优先权： JP2002-229552 20020807
- 主分类号： G03F7/004
- IPC分类号： G03F7/004
摘要：
A fluorine-containing compound represented by the formula 1, where R1 is a methyl group or trifluoromethyl group, each of R2 and R3 is independently a hydrogen atom or a group containing (a) a hydrocarbon group having a straight-chain, branched or ring form and having a carbon atom number of 1-25 or (b) an aromatic hydrocarbon group, the group optionally containing at least one of a fluorine atom, an oxygen atom and a carbonyl bond, l is an integer of from 0 to 2, each of m and n is independently an integer of 1-5 to satisfy an expression of m+n≦6, and when at least one of R1, R2 and R3 is in a plural number, the at least one of R1, R2 and R3 may be identical with or different from each other.