Invention Grant
US08691640B1 Methods of forming dielectrically isolated fins for a FinFET semiconductor by performing an etching process wherein the etch rate is modified via inclusion of a dopant material 有权
通过进行蚀刻工艺形成用于FinFET半导体的介电隔离鳍片的方法,其中蚀刻速率通过掺杂材料

  • Patent Title: Methods of forming dielectrically isolated fins for a FinFET semiconductor by performing an etching process wherein the etch rate is modified via inclusion of a dopant material
  • Patent Title (中): 通过进行蚀刻工艺形成用于FinFET半导体的介电隔离鳍片的方法,其中蚀刻速率通过掺杂材料
  • Application No.: US13745927
    Application Date: 2013-01-21
  • Publication No.: US08691640B1
    Publication Date: 2014-04-08
  • Inventor: Nicholas V. LiCausiJeremy A. Wahl
  • Applicant: GLOBALFOUNDRIES Inc.
  • Applicant Address: KY Grand Cayman
  • Assignee: GLOBALFOUNDRIES Inc.
  • Current Assignee: GLOBALFOUNDRIES Inc.
  • Current Assignee Address: KY Grand Cayman
  • Agency: Amerson Law Firm, PLLC
  • Main IPC: H01L21/00
  • IPC: H01L21/00
Methods of forming dielectrically isolated fins for a FinFET semiconductor by performing an etching process wherein the etch rate is modified via inclusion of a dopant material
Abstract:
One illustrative method disclosed herein includes forming a plurality of trenches in a semiconductor substrate to thereby define an initial fin structure, forming sidewall spacers adjacent the initial fin structure, wherein the spacers cover a first portion of the initial fin structure and expose a second a portion of the initial fin structure, performing a doping process to form N-type doped regions in at least the exposed portion of the initial fin structure, and performing an etching process to remove at least a portion of the doped regions and thereby define a final fin structure that is vertically spaced apart from the substrate.
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