Invention Grant
- Patent Title: Method of use for a multipole detector for a transmission electron microscope
- Patent Title (中): 用于透射电子显微镜的多极检测器的方法
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Application No.: US12564617Application Date: 2009-09-22
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Publication No.: US08692196B2Publication Date: 2014-04-08
- Inventor: Peter Christiaan Tiemeijer , Uwe Luecken , Alan Frank de Jong , Hendrik Nicolaas Slingerland
- Applicant: Peter Christiaan Tiemeijer , Uwe Luecken , Alan Frank de Jong , Hendrik Nicolaas Slingerland
- Applicant Address: US OR Hillsboro
- Assignee: FEI Company
- Current Assignee: FEI Company
- Current Assignee Address: US OR Hillsboro
- Agency: Scheinberg & Assoc., PC
- Agent Ki O; Michael O. Scheinberg
- Priority: EP08164799 20080922
- Main IPC: G01N23/00
- IPC: G01N23/00
Abstract:
The invention relates to a method for correcting distortions introduced by the projection system (106) of a TEM. As known to the person skilled in the art distortions may limit the resolution of a TEM, especially when making a 3D reconstruction of a feature using tomography. Also when using strain analysis in a TEM the distortions may limit the detection of strain.To this end the invention discloses a detector equipped with multipoles (152), the multipoles warping the image of the TEM in such a way that distortions introduced by the projection system are counteracted. The detector may further include a CCD or a fluorescent screen (151) for detecting the electrons.
Public/Granted literature
- US20100072366A1 METHOD FOR CORRECTING DISTORTIONS IN A PARTICLE-OPTICAL APPARATUS Public/Granted day:2010-03-25
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