发明授权
US08692222B2 Nonvolatile memory element and method of manufacturing the nonvolatile memory element
有权
非易失性存储元件和制造非易失性存储元件的方法
- 专利标题: Nonvolatile memory element and method of manufacturing the nonvolatile memory element
- 专利标题(中): 非易失性存储元件和制造非易失性存储元件的方法
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申请号: US13575338申请日: 2011-12-12
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公开(公告)号: US08692222B2公开(公告)日: 2014-04-08
- 发明人: Shinichi Yoneda , Takumi Mikawa
- 申请人: Shinichi Yoneda , Takumi Mikawa
- 申请人地址: JP Osaka
- 专利权人: Panasonic Corporation
- 当前专利权人: Panasonic Corporation
- 当前专利权人地址: JP Osaka
- 代理机构: Wenderoth, Lind & Ponack, L.L.P.
- 优先权: JP2010-291368 20101227
- 国际申请: PCT/JP2011/006912 WO 20111212
- 国际公布: WO2012/090404 WO 20120705
- 主分类号: H01L47/00
- IPC分类号: H01L47/00
摘要:
A nonvolatile memory element according to the present disclosure includes: a variable resistance element including a first electrode layer, a second electrode layer, and a variable resistance layer which is located between the first electrode layer and the second electrode layer and has a resistance value that reversibly changes based on an electrical signal applied between the first electrode layer and the second electrode layer; and a fixed resistance layer having a predetermined resistance value and stacked together with the variable resistance element. The variable resistance layer includes (i) a first transition metal oxide layer which is oxygen deficient and (ii) a second transition metal oxide layer which has a higher oxygen content atomic percentage than the first transition metal oxide layer. The predetermined resistance value ranges from 70Ω to 1000Ω inclusive.
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