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US08692238B2 Semiconductor devices and methods of preparation 有权
半导体器件及其制备方法

Semiconductor devices and methods of preparation
Abstract:
An organic film-forming polymer has a Tg of at least 70° C. and comprises a backbone comprising recurring units of Structure (A) shown in this application. These organic film-forming polymers can be used as dielectric materials in various devices with improved properties such as improved mobility.
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