Invention Grant
- Patent Title: Integrated mechanical device for electrical switching
- Patent Title (中): 集成电气开关机械装置
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Application No.: US13687932Application Date: 2012-11-28
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Publication No.: US08692247B2Publication Date: 2014-04-08
- Inventor: Pascal Fornara , Christian Rivero , Antonio di-Giacomo
- Applicant: STMicroelectronics (Rousset) SAS
- Applicant Address: FR Rousset
- Assignee: STMicroelectronics (Rousset) SAS
- Current Assignee: STMicroelectronics (Rousset) SAS
- Current Assignee Address: FR Rousset
- Agency: Slater & Matsil, L.L.P.
- Priority: FR1161407 20111209
- Main IPC: H01L23/58
- IPC: H01L23/58

Abstract:
An integrated circuit comprising a mechanical device for electrical switching comprising a first assembly being thermally deformable and having a beam held at at least two different locations by at least two arms, the beam and the arms being metal and disposed within the same metallization level, and further comprising at least one electrically conducting body. The first assembly has a first configuration at a first temperature and a second configuration at a second temperature different from the first temperature. The beam is out of contact with the electrically conducting body in one configuration in contact with the body in the other configuration. The beam establishes or breaks an electrical link passing through the said at least one electrically conducting body and through the said beam in the different configurations.
Public/Granted literature
- US20130146873A1 Integrated Mechanical Device for Electrical Switching Public/Granted day:2013-06-13
Information query
IPC分类: