发明授权
- 专利标题: Resistor integrated with transistor having metal gate
- 专利标题(中): 与具有金属栅极的晶体管集成的电阻器
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申请号: US13949230申请日: 2013-07-24
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公开(公告)号: US08692334B2公开(公告)日: 2014-04-08
- 发明人: Chun-Mao Chiou , Ti-Bin Chen , Tsung-Min Kuo , Shyan-Liang Chou , Yao-Chang Wang , Chi-Sheng Tseng , Jie-Ning Yang , Po-Jui Liao
- 申请人: United Microelectronics Corp.
- 申请人地址: TW Science-Based Industrial Park, Hsin-Chu
- 专利权人: United Microelectronics Corp.
- 当前专利权人: United Microelectronics Corp.
- 当前专利权人地址: TW Science-Based Industrial Park, Hsin-Chu
- 代理商 Winston Hsu; Scott Margo
- 主分类号: H01L21/70
- IPC分类号: H01L21/70
摘要:
A method of manufacturing a resistor integrated with a transistor having metal gate includes providing a substrate having a transistor region and a resistor region defined thereon, a transistor is positioned in the transistor region and a resistor is positioned in the resistor region; forming a dielectric layer exposing tops of the transistor and the resistor on the substrate; performing a first etching process to remove portions of the resistor to form two first trenches respectively at two opposite ends of the resistor; forming a patterned protecting layer in the resistor region; performing a second etching process to remove a dummy gate of the transistor to form a second trench in the transistor region; and forming a metal layer filling the first trenches and the second trench.
公开/授权文献
- US20130307084A1 RESISTOR INTEGRATED WITH TRANSISTOR HAVING METAL GATE 公开/授权日:2013-11-21
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