Invention Grant
US08692466B2 Method and apparatus of providing power to ignite and sustain a plasma in a reactive gas generator
有权
提供功率以在反应性气体发生器中点燃和维持等离子体的方法和装置
- Patent Title: Method and apparatus of providing power to ignite and sustain a plasma in a reactive gas generator
- Patent Title (中): 提供功率以在反应性气体发生器中点燃和维持等离子体的方法和装置
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Application No.: US12394904Application Date: 2009-02-27
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Publication No.: US08692466B2Publication Date: 2014-04-08
- Inventor: Souheil Benzerrouk , Siddharth P. Nagarkatti , Andrew Cowe , Ali Shajii , Jesse E. Ambrosina , Ken Tran , Xing Chen
- Applicant: Souheil Benzerrouk , Siddharth P. Nagarkatti , Andrew Cowe , Ali Shajii , Jesse E. Ambrosina , Ken Tran , Xing Chen
- Applicant Address: US MA Andover
- Assignee: MKS Instruments Inc.
- Current Assignee: MKS Instruments Inc.
- Current Assignee Address: US MA Andover
- Agency: Proskauer Rose LLP
- Main IPC: H01J7/24
- IPC: H01J7/24
Abstract:
Described are methods and apparatuses, including computer program products, for igniting and/or sustaining a plasma in a reactive gas generator. Power is provided from an ignition power supply to a plasma ignition circuit. A pre-ignition signal of the plasma ignition circuit is measured. The power provided to the plasma ignition circuit is adjusted based on the measured pre-ignition signal and an adjustable pre-ignition control signal. The adjustable pre-ignition control signal is adjusted after a period of time has elapsed.
Public/Granted literature
- US20100219757A1 Method and Apparatus of Providing Power to Ignite and Sustain a Plasma in a Reactive Gas Generator Public/Granted day:2010-09-02
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