发明授权
- 专利标题: Photoresist stripping solution and a method of stripping photoresists using the same
- 专利标题(中): 光阻剥离溶液和使用其剥离光致抗蚀剂的方法
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申请号: US12662151申请日: 2010-04-01
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公开(公告)号: US08697345B2公开(公告)日: 2014-04-15
- 发明人: Kazumasa Wakiya , Shigeru Yokoi
- 申请人: Kazumasa Wakiya , Shigeru Yokoi
- 申请人地址: JP Kanagawa-ken
- 专利权人: Tokyo Ohka Kogyo Co., Ltd.
- 当前专利权人: Tokyo Ohka Kogyo Co., Ltd.
- 当前专利权人地址: JP Kanagawa-ken
- 代理机构: Wenderoth, Lind & Ponack, L.L.P.
- 优先权: JP2001-397568 20011227
- 主分类号: G03F7/42
- IPC分类号: G03F7/42 ; G03F7/36 ; G03F7/40
摘要:
A photoresist stripping solution comprising (a) a specified quaternary ammonium hydroxide, such as tetrabutylammonium hydroxide, tetrapropylammonium hydroxide, methyltributylammonium hydroxide or methyltripropylammonium hydroxide, (b) a water-soluble amine, (c) water, (d) a corrosion inhibitor and (e) a water-soluble organic solvent, the compounding ratio of component (a) to component (b) being in the range of from 1:3 to 1:10 by mass, as well as a method of stripping photoresists using the solution. The stripping solution of the invention assures effective protection of Al, Cu and other wiring metal conductors against corroding as well as efficient stripping of the photoresist film, post-ashing residues such as modified photoresist film and metal depositions. It also assures efficient stripping of Si-based residues and effective protection of the substrate (particularly the reverse side of a Si substrate) from corroding.
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