发明授权
- 专利标题: Semiconductor device and method of manufacturing the same
- 专利标题(中): 半导体装置及其制造方法
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申请号: US13303850申请日: 2011-11-23
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公开(公告)号: US08698236B2公开(公告)日: 2014-04-15
- 发明人: Yasuhiro Takeda , Shinya Inoue , Yuzo Otsuru
- 申请人: Yasuhiro Takeda , Shinya Inoue , Yuzo Otsuru
- 申请人地址: US AZ Phoenix
- 专利权人: Semiconductor Components Industries, LLC
- 当前专利权人: Semiconductor Components Industries, LLC
- 当前专利权人地址: US AZ Phoenix
- 优先权: JP2010-261270 20101124
- 主分类号: H01L29/78
- IPC分类号: H01L29/78
摘要:
The invention provides an LDMOS transistor of which the time-dependent degrading of the performance due to the trapping of hot electrons in the gate insulation film is decreased. A body layer is disposed in a surface portion of an N−− type semiconductor layer. A source layer including an N− type layer is disposed in a surface portion of the body layer. An N− type drift layer is formed in a surface portion of the N−− type semiconductor layer. This drift layer includes a first region having a first N type impurity concentration peak region and a second region having a second N type impurity concentration peak region that is positioned deeper than the first N type impurity concentration peak region, the second region adjoining this first region. An N+ type drain layer is formed in a surface portion of the second region.
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