Invention Grant
US08704361B2 Sealing glass for semiconductor device, sealing material, sealing material paste, and semiconductor device and its production process 有权
半导体器件密封玻璃,密封材料,密封材料浆料和半导体器件及其生产工艺

Sealing glass for semiconductor device, sealing material, sealing material paste, and semiconductor device and its production process
Abstract:
A sealing glass, a sealing material, and a sealing material paste, which suppress metal deposition by reducing glass components (metal oxides) without decreasing the reactivity with and the adhesion to a semiconductor substrate. The sealing glass, contains a low temperature melting glass containing, by mass ratio: from 0.1 to 5% of at least one metal oxide selected from the group consisting of Fe, Mn, Cr, Co, Ni, Nb, Hf, W, Re, a rare earth element, and optionally Mo; and from 5 to 100 ppm by mass ratio of K2O, wherein the low temperature melting glass has a softening point of at most 430° C. The sealing material device, contains the sealing glass and an inorganic filler in an amount of from 0 to 40% by volume ratio. The sealing material paste contains a mixture of the sealing material and a vehicle.
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