发明授权
US08705331B2 Optical element and objective lens through which a plurality of light beams having different design wavelengths pass 有权
具有不同设计波长的多个光束通过的光学元件和物镜

Optical element and objective lens through which a plurality of light beams having different design wavelengths pass
摘要:
A method of designing an optical element to be used for an optical system in which each of a plurality of light beams having different design wavelengths passes through the optical element is provided. The method includes determining at least two types of optical path difference functions including first and second optical path difference functions in such a manner that proportion, brought by the first optical path difference function, between diffraction orders at which diffraction efficiencies of the plurality of light beams are maximized is different from proportion, brought by the second optical path difference function, between diffraction orders at which diffraction efficiencies of the plurality of light beams are maximized, and obtaining a shape defined by combining the at least two types of optical path difference functions so as to apply the obtained shape to at least one surface of surfaces of the optical element.
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