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US08705777B2 MEMS microphone and method of manufacturing the same 失效
MEMS麦克风及其制造方法相同

MEMS microphone and method of manufacturing the same
Abstract:
Disclosed are a MEMS microphone and a method of manufacturing the same. The MEMS microphone includes: a substrate; a rear acoustic chamber formed inside a front surface of the substrate; a vibrating plate formed on the substrate and having an exhaust hole; a fixed electrode formed on the vibrating plate; and a fixed electrode support supported by a bottom of the rear acoustic chamber and connected to the fixed electrode through the exhaust hole.
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