Invention Grant
- Patent Title: MEMS microphone and method of manufacturing the same
- Patent Title (中): MEMS麦克风及其制造方法相同
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Application No.: US13601896Application Date: 2012-08-31
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Publication No.: US08705777B2Publication Date: 2014-04-22
- Inventor: Chang Han Je , Jae Woo Lee , Woo Seok Yang , Jong Dae Kim
- Applicant: Chang Han Je , Jae Woo Lee , Woo Seok Yang , Jong Dae Kim
- Applicant Address: KR Daejeon
- Assignee: Electronics and Telecommunications Research Institute
- Current Assignee: Electronics and Telecommunications Research Institute
- Current Assignee Address: KR Daejeon
- Priority: KR10-2011-0104107 20111012
- Main IPC: H04R1/00
- IPC: H04R1/00 ; H04R31/00

Abstract:
Disclosed are a MEMS microphone and a method of manufacturing the same. The MEMS microphone includes: a substrate; a rear acoustic chamber formed inside a front surface of the substrate; a vibrating plate formed on the substrate and having an exhaust hole; a fixed electrode formed on the vibrating plate; and a fixed electrode support supported by a bottom of the rear acoustic chamber and connected to the fixed electrode through the exhaust hole.
Public/Granted literature
- US20130094675A1 MEMS MICROPHONE AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2013-04-18
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