发明授权
US08707553B2 Method and system for improving alignment precision of parts in MEMS
失效
提高MEMS零件对准精度的方法和系统
- 专利标题： Method and system for improving alignment precision of parts in MEMS
- 专利标题（中）： 提高MEMS零件对准精度的方法和系统
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申请号： US11571811申请日： 2005-05-17
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公开(公告)号： US08707553B2公开(公告)日： 2014-04-29
- 发明人: Stefano S. Oggioni , Michel Despont , Mark Lantz , Thomas Albrecht
- 申请人： Stefano S. Oggioni , Michel Despont , Mark Lantz , Thomas Albrecht
- 申请人地址： US NY Armonk
- 专利权人： International Business Machines Corporation
- 当前专利权人： International Business Machines Corporation
- 当前专利权人地址： US NY Armonk
- 代理商 Katherine S. Brown
- 优先权： EP04103257 20040708; EP05749745 20050517
- 国际申请： PCT/EP2005/052248 WO 20050517
- 国际公布： WO2006/005643 WO 20060119
- 主分类号： H05K3/30
- IPC分类号： H05K3/30 ; H05K3/20
摘要：
A method and system for improving alignment precision of a pair of MEMS parts. The method involves stacking the two parts such that at least one rolling element is between facing surfaces of said two parts, and each rolling element has a first diameter and an axis of rotation parallel to the facing surfaces. The first and second of a pair of MEMS parts respectively include a first alignment pad and a second alignment pad and a liquid drop formed in contact with both alignment pads can align the two parts which can then be locked together by solidification of solder while remaining spaced by the first diameter.