发明授权
- 专利标题: Actuator, actuator structure and method of manufacturing actuator
- 专利标题(中): 执行机构,执行机构结构及其制造方法
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申请号: US13032181申请日: 2011-02-22
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公开(公告)号: US08710716B2公开(公告)日: 2014-04-29
- 发明人: Takamichi Fujii , Yasutoshi Hirabayashi
- 申请人: Takamichi Fujii , Yasutoshi Hirabayashi
- 申请人地址: JP Tokyo
- 专利权人: FUJIFILM Corporation
- 当前专利权人: FUJIFILM Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Birch, Stewart, Kolasch & Birch, LLP
- 优先权: JP2010-037623 20100223
- 主分类号: H01L41/22
- IPC分类号: H01L41/22
摘要:
An actuator includes: a diaphragm having a thickness equal to or greater than 0.5 μm and equal to or less than 20 μm; a piezoelectric body layer which is provided on a first surface side of the diaphragm, and receives stress from the diaphragm; a pair of electrodes which is provided on the first surface side of the diaphragm together with the piezoelectric body layer, and is mutually opposing via the piezoelectric body layer; and a stress adjusting layer which is provided on a second surface side of the diaphragm on an opposite side to the first surface of the diaphragm, and receives stress from the diaphragm in a same direction as the stress that the piezoelectric body layer receives from the diaphragm.
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