发明授权
- 专利标题： Moving structure and micro-mirror device using the same
- 专利标题（中）： 移动结构和微镜装置使用相同
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申请号： US13001217申请日： 2009-06-24
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公开(公告)号： US08711460B2公开(公告)日： 2014-04-29
- 发明人: Hideki Ueda , Hiroshi Noge , Kiyohiko Kawano , Hiroaki Tachibana
- 申请人： Hideki Ueda , Hiroshi Noge , Kiyohiko Kawano , Hiroaki Tachibana
- 申请人地址： JP Osaka
- 专利权人： Panasonic Corporation
- 当前专利权人： Panasonic Corporation
- 当前专利权人地址： JP Osaka
- 代理机构： Greenblum & Bernstein, P.L.C.
- 优先权： JP2008-166581 20080625
- 国际申请： PCT/JP2009/061528 WO 20090624
- 国际公布： WO2009/157486 WO 20091230
- 主分类号： G02B26/08
- IPC分类号： G02B26/08 ; E05F1/08
摘要：
In a moving structure, stability of swing motion of a moving plate is increased by enhancing tensional rigidity or flexural rigidity while restraining torsion rigidity of the hinge units. The hinge units of ladder shape with honeycombed portions are formed by twin supporting rods and crosspieces bridged between the twin supporting rods so as to support the moving plate rotatably. The tensional rigidity or the flexural rigidity is increased while restraining the torsion rigidity of the hinge units by the honeycombed portions of the hinge units.
公开/授权文献
- US20110170157A1 MOVING STRUCTURE AND MICRO-MIRROR DEVICE USING THE SAME 公开/授权日：2011-07-14