发明授权
- 专利标题: Method for crystallizing amorphous silicon thin film and method for fabricating poly crystalline thin film transistor using the same
- 专利标题(中): 用于使非晶硅薄膜结晶的方法和使用其制造多晶薄膜晶体管的方法
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申请号: US13630148申请日: 2012-10-16
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公开(公告)号: US08716112B2公开(公告)日: 2014-05-06
- 发明人: Seung Ki Joo , Chang Woo Byun , Se Wan Son , Yong Woo Lee , Hyun Mo Kang , Seol Ah Park , Woo Chang Lim , Tao Li , Seung Jae Yun , Sang Joo Lee
- 申请人: Seung Ki Joo , Chang Woo Byun , Se Wan Son , Yong Woo Lee , Hyun Mo Kang , Seol Ah Park , Woo Chang Lim , Tao Li , Seung Jae Yun , Sang Joo Lee
- 申请人地址: KR
- 专利权人: Seung Ki Joo
- 当前专利权人: Seung Ki Joo
- 当前专利权人地址: KR
- 代理机构: Cantor Colburn LLP
- 优先权: KR10-2012-0038103 20120412; KR10-2012-0039068 20120416; KR10-2012-0049877 20120510
- 主分类号: H01L21/20
- IPC分类号: H01L21/20
摘要:
Provided is a method of crystallizing an amorphous silicon thin film transistor and a method of fabricating a polycrystalline thin film transistor using the same, in which the polycrystalline thin film transistor indicating leakage current characteristics of a level that is applicable for active matrix organic light emitting diode displays (AMOLEDs) can be manufactured by using a silicide seed induced lateral crystallization (SILC) method. The amorphous silicon thin film transistor crystallizing method includes the steps of: forming an amorphous silicon layer on a substrate; forming an active region by patterning the amorphous silicon layer; forming a crystallization induced metal layer in both a source region and a drain region that are placed on both side ends of the active region; forming a number of dot-shaped metal silicide seeds on the surfaces of the source region and the drain region made of amorphous silicon by removing the crystallization induced metal layer; and crystallizing the active region formed of the amorphous silicon layer by heat-treating the substrate by using the metal silicide seeds as crystallization seeds.
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