发明授权
- 专利标题: Minute flow rate controller with entrance throttle groove
- 专利标题(中): 具有入口节流槽的分钟流量控制器
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申请号: US12448569申请日: 2006-12-28
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公开(公告)号: US08718984B2公开(公告)日: 2014-05-06
- 发明人: Kotohiko Sekoguchi
- 申请人: Kotohiko Sekoguchi
- 申请人地址: JP Osaka JP Osaka
- 专利权人: Fujikin Incorporated,Kotohiko Sekoguchi
- 当前专利权人: Fujikin Incorporated,Kotohiko Sekoguchi
- 当前专利权人地址: JP Osaka JP Osaka
- 代理机构: DLA Piper LLP (US)
- 国际申请: PCT/JP2006/326205 WO 20061228
- 国际公布: WO2008/081530 WO 20080710
- 主分类号: G06F7/60
- IPC分类号: G06F7/60 ; G06F17/10
摘要:
With respect to a minute flow rate controller comprising inflow passage (12) for introducing a fluid, valve member (2) furnished with main throttle groove (6) for causing the introduced flow to flow from a starting end toward a finishing end thereof, fluid outflow port (20) opened with an optional cross section by a flow rate regulating member and outflow passage (14) for leading out the fluid flowing out from the fluid outflow port (20), there is provided a method of designing the controller with entrance throttle groove, comprising providing the entrance throttle groove (8) communicably preceding the starting end position of the main throttle groove (6), and, on the basis of a relational expression derived from the momentum equation of the fluid flowing through the groove (8) and the main throttle groove (6), determining the size of the groove (8) so as to exhibit a desired flow resistance.
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