发明授权
- 专利标题： Acoustic sensor and method of manufacturing the same
- 专利标题（中）： 声传感器及其制造方法
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申请号： US13796018申请日： 2013-03-12
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公开(公告)号： US08722446B2公开(公告)日： 2014-05-13
- 发明人: Jaewoo Lee , Chang Han Je , Woo Seok Yang , Jongdae Kim
- 申请人： Electronics and Telecommunications Research Institute
- 申请人地址： KR Daejeon
- 专利权人： Electronics and Telecommunications Research Institute
- 当前专利权人： Electronics and Telecommunications Research Institute
- 当前专利权人地址： KR Daejeon
- 代理机构： Rabin & Berdo, P.C.
- 优先权： KR10-2010-0103368 20101022
- 主分类号： H01L21/00
- IPC分类号： H01L21/00
摘要：
Provided is an acoustic sensor. The acoustic sensor includes: a substrate including sidewall portions and a bottom portion extending from a bottom of the sidewall portions; a lower electrode fixed at the substrate and including a concave portion and a convex portion, the concave portion including a first hole on a middle region of the bottom, the convex portion including a second hole on an edge region of the bottom; diaphragms facing the concave portion of the lower electrode, with a vibration space therebetween; diaphragm supporters provided on the lower electrode at a side of the diaphragm and having a top surface having the same height as the diaphragm; and an acoustic chamber provided in a space between the bottom portion and the sidewall portions below the lower electrode.
公开/授权文献
- US20130185928A1 ACOUSTIC SENSOR AND METHOD OF MANUFACTURING THE SAME 公开/授权日：2013-07-25
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