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US08722913B2 Method for producing higher silanes 有权
生产高级硅烷的方法

Method for producing higher silanes
摘要:
The invention relates to a method for producing dimeric and/or trimeric silicon compounds, in particular silicon halogen compounds. The claimed method is also suitable for producing corresponding germanium compounds. The invention also relates to a device for carrying out said method to the use of the produced silicon compounds.
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