发明授权
- 专利标题: Micromechanical structures
- 专利标题(中): 微机械结构
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申请号: US12683316申请日: 2010-01-06
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公开(公告)号: US08726731B2公开(公告)日: 2014-05-20
- 发明人: Johannes Classen , Christoph Gauger
- 申请人: Johannes Classen , Christoph Gauger
- 申请人地址: DE Stuttgart
- 专利权人: Robert Bosch GmbH
- 当前专利权人: Robert Bosch GmbH
- 当前专利权人地址: DE Stuttgart
- 代理机构: Kenyon & Kenyon LLP
- 优先权: DE102009000606 20090204
- 主分类号: G01C19/56
- IPC分类号: G01C19/56
摘要:
A micromechanical structure including a substrate having a main plane of extension, and including a first seismic mass, the first seismic mass including a grid structure made of intersecting first mass lines and the first seismic mass being flexibly secured with the aid of first bending-spring elements, and moreover, a first line width of the first mass lines parallel to the main plane of extension being between 20 and 50 percent of a further first line width of the first bending-spring elements parallel to the main plane of extension.
公开/授权文献
- US20100192690A1 MICROMECHANICAL STRUCTURES 公开/授权日:2010-08-05