发明授权
- 专利标题: Method for synthesizing a thin film
- 专利标题(中): 合成薄膜的方法
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申请号: US13475167申请日: 2012-05-18
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公开(公告)号: US08728575B2公开(公告)日: 2014-05-20
- 发明人: Xuesong Li , Yu-Ming Lin , Chun-Yung Sung
- 申请人: Xuesong Li , Yu-Ming Lin , Chun-Yung Sung
- 主分类号: C23C16/26
- IPC分类号: C23C16/26 ; C23C16/34
摘要:
A method for synthesizing a thin film, the method containing the steps of: (a) providing a substrate support assembly containing at least two selectively interdigitable substrate support fixtures; (b) loading a substrate for thin film synthesis onto said at least two fixtures; (c) interdigitating said at least two fixtures; (d) positioning said at least two fixtures in a reaction chamber and forming a thin film on a surface of the substrate; and (e) unloading the substrate from said at least two fixtures.
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